TY  - BOOK
AU  - Hsu, Tai-Ran ,
TI  - Mems and Microsystems : Design and Manufacture
SN  - 007048709X
U1  - 621 
PY  - 2007///
CY  - New Delhi
PB  - Tata McGraw - Hill Publishing Co. Ltd.
KW  - Applied physics
KW  - Microelectronics
ER  -