| 000 | 00578nam a2200157Ia 45e0 | ||
|---|---|---|---|
| 008 | 140108n2007 ii |||gr||||Z||||||eng | ||
| 020 | _a007048709X | ||
| 082 | _a621 | ||
| 100 |
_aHsu, Tai-Ran , _eAuthor., |
||
| 245 | 0 |
_aMems and Microsystems : Design and Manufacture _cTai-Ran Hsu _hTextual Documents |
|
| 260 |
_aNew Delhi _bTata McGraw - Hill Publishing Co. Ltd. _c2007 |
||
| 300 | _a436. | ||
| 653 | _aApplied physics | ||
| 653 | _aMicroelectronics | ||
| 942 |
_2ddc _cTXT |
||
| 999 |
_c15015 _d15015 |
||